Characteristics of Oxide Layer Grown by Rapid Thermal Oxidation on GaN

제목
Characteristics of Oxide Layer Grown by Rapid Thermal Oxidation on GaN
저자
BYUN, Dong Jin
학회명
processing and properties of advanced engineering materials (The 3rd international symposium on designing)
개최지
Cheju, Korea
학회 개최일
2003-11-05 ~ 2003-11-08