Neural network modeling of electrical characteristics for low temperature silicon nitride deposited by inner two parallel coil ICPCVD

Neural network modeling of electrical characteristics for low temperature silicon nitride deposited by inner two parallel coil ICPCVD
제목
Neural network modeling of electrical characteristics for low temperature silicon nitride deposited by inner two parallel coil ICPCVD
제목 (타언어)
Neural network modeling of electrical characteristics for low temperature silicon nitride deposited by inner two parallel coil ICPCVD
저자
PARK KANG-BAK
발행일
2013-07-11
학회명
The 11th NANO KOREA 2013 Symposium
개최지
Seoul(COEX)
개최국가
대한민국
학회 개최일
2013-07-10 ~ 2013-07-12