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Neural network modeling of electrical characteristics for low temperature silicon nitride deposited by inner two parallel coil ICPCVD
Neural network modeling of electrical characteristics for low temperature silicon nitride deposited by inner two parallel coil ICPCVD
- 제목
- Neural network modeling of electrical characteristics for low temperature silicon nitride deposited by inner two parallel coil ICPCVD
- 제목 (타언어)
- Neural network modeling of electrical characteristics for low temperature silicon nitride deposited by inner two parallel coil ICPCVD
- 저자
- PARK KANG-BAK
- 발행일
- 2013-07-11
- 학회명
- The 11th NANO KOREA 2013 Symposium
- 개최지
- Seoul(COEX)
- 개최국가
- 대한민국
- 학회 개최일
- 2013-07-10 ~ 2013-07-12