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Integrated planar spiral inductors with CoFe and NiFe ferromagnetic layer
- Kim, GyoungBum;
- Cha, Seung-Yong;
- Hyun, Eun-Kyung;
- Jung, YoungChai;
- Choi, YoonSuk;
- ... Rieh, Jae-Sung;
- 외 2명
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16초록
Inductance increase tip to 28% was obtained for on-chip spiral inductors by employing DC-sputtered CoFe and NiFe ferromagnetic (FM) layer on top of the spirals. It was also observed that slit-patterned FM layers exhibited better quality factors than blanket FM layers, leading to values comparable to that of the inductors without FM layer. (c) 2008 Wiley Periodicals, Inc.
키워드
ferromagnetic spiral inductor; quality factor; inductance; ferromagnetic materials
- 제목
- Integrated planar spiral inductors with CoFe and NiFe ferromagnetic layer
- 저자
- Kim, GyoungBum; Cha, Seung-Yong; Hyun, Eun-Kyung; Jung, YoungChai; Choi, YoonSuk; Rieh, Jae-Sung; Lee, Seong-Rae; Hwang, SungWoo
- 발행일
- 2008-03
- 유형
- Article
- 권
- 50
- 호
- 3
- 페이지
- 676 ~ 678