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Temperature dependence of ZnO growth mechanism on Si(100) substrate by atomic layer deposition
Temperature dependence of ZnO growth mechanism on Si(100) substrate by atomic layer deposition
- 제목
- Temperature dependence of ZnO growth mechanism on Si(100) substrate by atomic layer deposition
- 제목 (타언어)
- Temperature dependence of ZnO growth mechanism on Si(100) substrate by atomic layer deposition
- 저자
- BYUN, Dong Jin
- 발행일
- 2016-07-06
- 학회명
- The 18th international symposium on the physics of semiconductors and applications
- 개최국가
- 대한민국
- 학회 개최일
- 2016-07-03 ~ 2016-07-07