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3-axes flexible tactile sensor fabricated by Si micromachining and packaging technology

  • Pak, James Jungho
제목
3-axes flexible tactile sensor fabricated by Si micromachining and packaging technology
저자
Pak, James Jungho
학회명
The 19th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2006)
개최국가
튀르키예
학회 개최일
2006-01-22 ~ 2006-01-26

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