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Fabrication of nano-patterned imprinting stamp based on conventional CMOS process
- 제목
- Fabrication of nano-patterned imprinting stamp based on conventional CMOS process
- 저자
- Lee, Heon
- 학회명
- NNT 2003 Conference
- 개최지
- Boston, Massachusetts
- 학회 개최일
- 2003-12-05 ~ 2003-12-05