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A Novel Design of Capacitive Humidity Sensor with Cavity Structure by MEMS Technology

  • Moon Byung-Moo
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A Novel Design of Capacitive Humidity Sensor with Cavity Structure by MEMS Technology
저자
Moon Byung-Moo
학회명
15th International Conference on Electrical Engineering
학회 개최일
2008-07-06 ~ 2008-07-10

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