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A low temperature hermetic package using liquid crystal polymer (LCP) materials for MEMS device

  • Hwang, Sung Woo
제목
A low temperature hermetic package using liquid crystal polymer (LCP) materials for MEMS device
저자
Hwang, Sung Woo
학회명
2007 International Conference on Nano Science and Nano Technology
학회 개최일
2007-11-08 ~ 2007-11-09

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