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A Front-side Dry-Etched Thermopile Detector with 3-5 ㎛ Infrared Absorber and Its Application to Novel NDIR CO2 Gas Sensors

A Front-side Dry-Etched Thermopile Detector with 3-5 ㎛ Infrared Absorber and Its Application to Novel NDIR CO2 Gas Sensors
  • Min Nam Ki
제목
A Front-side Dry-Etched Thermopile Detector with 3-5 ㎛ Infrared Absorber and Its Application to Novel NDIR CO2 Gas Sensors
제목 (타언어)
A Front-side Dry-Etched Thermopile Detector with 3-5 ㎛ Infrared Absorber and Its Application to Novel NDIR CO2 Gas Sensors
저자
Min Nam Ki
학회명
IEEE Sensors 2008
개최국가
이탈리아
학회 개최일
2008-10-26 ~ 2008-10-29

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