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A study on the effect of catalysts to SiC nanowire growth by APCVD using hexamethyldisilane
- 제목
- A study on the effect of catalysts to SiC nanowire growth by APCVD using hexamethyldisilane
- 저자
- BYUN, Dong Jin
- 학회명
- Proceeding of LOCS International Symposium 2003
- 학회 개최일
- 2003-01-01 ~ 2003-01-02