ScholarWorks@고려대학교

상세 보기

HARS(High Aspect Ratio Structure) Fabrication for 3D MEMS Antenna Array Using Novel Photolithography Apparatus

  • Pak, James Jungho
제목
HARS(High Aspect Ratio Structure) Fabrication for 3D MEMS Antenna Array Using Novel Photolithography Apparatus
저자
Pak, James Jungho
학회명
제 9회 한국 반도체 학술대회
개최지
천안상록리조트 컨벤션 센터
개최국가
대한민국
학회 개최일
2002-02-21 ~ 2002-02-22

ScholarWorks@고려대학교

02841 서울특별시 성북구 안암로 145 Tel. 02-3290-2963

COPYRIGHT © 고려대학교 All Rights Reserved.

Certain data included herein are derived from the © Web of Science of Clarivate Analytics. All rights reserved.

You may not copy or re-distribute this material in whole or in part without the prior written consent of Clarivate Analytics.