Electrical characteristics of amorphous indium-tin-gallium-zinc-oxide TFTs under positive gate bias stress

  • Kim, D.
  • Cho, K.
  • Woo, S.
  • Kim, S.
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초록

In this Letter, the authors investigate the electrical characteristics of amorphous indium-tin-gallium-zinc-oxide (a-ITGZO) thin-film transistors (TFTs) under positive gate bias stress (PBS). An as-prepared a-ITGZO TFT exhibits a mobility of 26.05 cm(2)/V.s, subthreshold swing of 183 mV, threshold voltage of -0.33 V, and on/off ratio of 1.34 x 10(8). These electrical characteristics deteriorate upon the application of PBS. The proposed experiments and simulations reveal that this deterioration can be attributed to the increase in the density of acceptor-like conduction band-tail states and donor-like Gaussian states within the bandgap of the a-ITGZO channel material.

키워드

gallium compoundsindium compoundssemiconductor thin filmsII-VI semiconductorsconduction bandsthin film transistorszinc compoundsamorphous semiconductorstin compoundsthin-film transistorspositive gate bias stressPBSa-ITGZO TFTelectrical characteristicsa-ITGZO channel materialamorphous indium-tin-gallium-zinc-oxide thin-film transistorssubthreshold swingthreshold voltageacceptor-like conduction band-tail statesdonor-like Gaussian statesbandgapvoltage 1830 mVvoltage-033 VInSnGaZnO
제목
Electrical characteristics of amorphous indium-tin-gallium-zinc-oxide TFTs under positive gate bias stress
저자
Kim, D.Cho, K.Woo, S.Kim, S.
DOI
10.1049/el.2019.2784
발행일
2020-01-23
유형
Article
저널명
Electronics Letters
56
2
페이지
102 ~ 103