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A Novel Route to Nanostructured Patterns via Inductively Coupled Plasma Etching of Block Copolymer Templates on GaN layer
- 제목
- A Novel Route to Nanostructured Patterns via Inductively Coupled Plasma Etching of Block Copolymer Templates on GaN layer
- 저자
- Bang, Joona
- 발행일
- 2008-06-25
- 학회명
- 2008 Electronic Materials Conference
- 개최지
- University of California, Santa Barbara
- 개최국가
- 미국
- 학회 개최일
- 2008-06-25 ~ 2008-06-27