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Duty ratio-controlled reflective property of silicon nitride films deposited at room temperature using a pulsed-PECVD at SiH4-NH3 plasma

  • Donghwan KIM
제목
Duty ratio-controlled reflective property of silicon nitride films deposited at room temperature using a pulsed-PECVD at SiH4-NH3 plasma
저자
Donghwan KIM
학회명
IUMRS-ICEM
개최국가
대한민국
학회 개최일
2010-08-22 ~ 2010-08-27

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