Selective area growth of GaN with air void tunnel on patterned sapphire substrate by using sacrificial layer

Selective area growth of GaN with air void tunnel on patterned sapphire substrate by using sacrificial layer
제목
Selective area growth of GaN with air void tunnel on patterned sapphire substrate by using sacrificial layer
제목 (타언어)
Selective area growth of GaN with air void tunnel on patterned sapphire substrate by using sacrificial layer
저자
BYUN, Dong Jin
발행일
2018-08-21
학회명
IUMRS-ICEM 2018
개최국가
대한민국
학회 개최일
2018-08-19 ~ 2018-08-24