Improvement of Structural and Optical properties of GaN Epilayer Grown by Patterned ion Implantation

Improvement of Structural and Optical properties of GaN Epilayer Grown by Patterned ion Implantation
제목
Improvement of Structural and Optical properties of GaN Epilayer Grown by Patterned ion Implantation
제목 (타언어)
Improvement of Structural and Optical properties of GaN Epilayer Grown by Patterned ion Implantation
저자
BYUN, Dong Jin
발행일
2006-11-30
학회명
INTERNATIONAL SYMPOSIUM ON DRY PROECESS(DPS 2006)
개최지
Nagoya, Japan
개최국가
일본
학회 개최일
2006-11-29 ~ 2006-11-30