Design, Fabrication and Characterization of Front-side Dry-Etched Microbridge Structure Thermopile with 3-5 ㎛Infrared Absorber

  • Min Nam Ki
제목
Design, Fabrication and Characterization of Front-side Dry-Etched Microbridge Structure Thermopile with 3-5 ㎛Infrared Absorber
저자
Min Nam Ki
학회명
30th International Symposium on Dry Process
개최국가
일본
학회 개최일
2008-11-26 ~ 2008-11-28