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Resonance Properties and Mass sensitivity of Monolithic Microcantilever Sensors Actuated by Piezoelectric PZT Thick Film

  • Taeyun Kwon
제목
Resonance Properties and Mass sensitivity of Monolithic Microcantilever Sensors Actuated by Piezoelectric PZT Thick Film
저자
Taeyun Kwon
학회명
International Conference on Electroceramics 2005
개최국가
대한민국
학회 개최일
2005-06-14 ~ 2005-06-15

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