Development of 4 Degree-of-Freedom ultra-precision Stage with millimeter motion range

Development of 4 Degree-of-Freedom ultra-precision Stage with millimeter motion range
제목
Development of 4 Degree-of-Freedom ultra-precision Stage with millimeter motion range
제목 (타언어)
Development of 4 Degree-of-Freedom ultra-precision Stage with millimeter motion range
저자
Jaehwa Jeong
발행일
2012-10-18
학회명
2012 12th International Conference on Control, Automation and Systems
개최국가
대한민국
학회 개최일
2012-10-17 ~ 2012-10-21