Development of new patterning method of Zinc Oxide using sol-gel and nanoimprint lithography

제목
Development of new patterning method of Zinc Oxide using sol-gel and nanoimprint lithography
저자
Lee, Heon
학회명
MRS spring meeting 2008
개최국가
미국
학회 개최일
2008-03-24 ~ 2008-03-28