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In situ Measurement of Residual Stress during Deposition of cBN Film Using Unbalanced Magnetron Sputtering

  • CHOI, In-Hoon
제목
In situ Measurement of Residual Stress during Deposition of cBN Film Using Unbalanced Magnetron Sputtering
저자
CHOI, In-Hoon
발행일
2001-01-01

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