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Fabrication of suspended bridge type resonator using laser interference Fabrication of suspended bridge type resonator using laser interference lithography
- 제목
- Fabrication of suspended bridge type resonator using laser interference Fabrication of suspended bridge type resonator using laser interference lithography
- 저자
- Ju, Byeongkwon
- 학회명
- 제 14회 한국 MEMS 학술대회
- 개최국가
- 대한민국
- 학회 개최일
- 2012-04-05 ~ 2012-04-07