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A Low Voltage Two-Step Micromirror for the Pinhole of the Confocal Microscope

  • Pak, James Jungho
제목
A Low Voltage Two-Step Micromirror for the Pinhole of the Confocal Microscope
저자
Pak, James Jungho
학회명
IEEE/LEOS Optical MEMS 2005, International conference on Optical MEMS and Their Applications
학회 개최일
2005-08-01 ~ 2005-08-04

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