Channel width dependence of electrical characteristics of a-Si:H TFTs under bending stresses

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초록

In this study, we investigate the electrical characteristics of bendable a-Si:H thin-film transistors (TFTs) with various channel widths as a function of bending stress. Compared with a narrower channel TFT, a wider channel TFT exhibits a stable performance even at a bending strain of 1.3%. Our stress and strain distribution analysis reveals an inverse relationship between the channel width and the channel stress. As the channel width widens from 8 to 50 mu m, the stress experienced by the middle channel region decreases from 545 to 277 MPa. Moreover, a 50 mu m-channel-width TFT operates stably even after a 15 000 bending cycle while the 8 mu m-channel-width TFT fails to operate after a 2000 bending cycle.

키워드

bending stress; channel width; a-Si:H TFT; bendable TFT; MECHANICAL-PROPERTIES; SILICON; DISPLAYS; DEVICES; FILMS
제목
Channel width dependence of electrical characteristics of a-Si:H TFTs under bending stresses
저자
Oh, Hyungon; Cho, Kyoungah; Kim, Sangsig
DOI
10.1088/1361-6641/aa59a3
발행일
2017-04
유형
Article
저널명
Semiconductor Science and Technology
권
32
호
4