Investigation on fabrication of nanoscale patterns using laser interference lithography

제목
Investigation on fabrication of nanoscale patterns using laser interference lithography
저자
Ju, Byeongkwon
학회명
2010 Asia-Pacific Workshop on Fundamentals and Applications of Advanced Semiconductor Devices
개최국가
일본
학회 개최일
2010-06-30 ~ 2010-07-02