Scalable growth of free-standing graphene wafers with copper(Cu) catalyst on SiO2/Si substrate: Thermal conductivity of the wafers

  • Lee, Yun-Hi
  • Lee, Jong-Hee
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초록

The authors report scalable growth of free-standing graphene wafers with copper(Cu) catalyst on SiO2/Si substrate at low temperature and investigation of their thermal conductivity. The Cu is the most common and the cheapest catalyst among electronic materials. Our process for producing the graphene with the Cu is based on a low-pressure, fast-heating chemical vapor deposition method. Thermal conductivity measurements with nondestructive Raman spectroscopy showed that the free-standing-graphene is a good thermal conductor. The possibility of growing graphene wafer at low temperatures by using a Cu thin film should accelerate research and facilitate the development of graphene for practical applications.

키워드

catalystschemical vapour depositioncopperCVD coatingsgraphenemetallic thin filmsnondestructive testingRaman spectrasiliconsilicon compoundsthermal conductivityCARBON NANOTUBELAYER GRAPHENELARGE-AREAFILMS
제목
Scalable growth of free-standing graphene wafers with copper(Cu) catalyst on SiO2/Si substrate: Thermal conductivity of the wafers
저자
Lee, Yun-HiLee, Jong-Hee
DOI
10.1063/1.3324698
발행일
2010-02-22
유형
Article
저널명
Applied Physics Letters
96
8