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Chemical Etch Characteristics of N-Face and Ga-Face GaN by Hot H3PO4 and KOH

  • Kim, Ji Hyun
제목
Chemical Etch Characteristics of N-Face and Ga-Face GaN by Hot H3PO4 and KOH
저자
Kim, Ji Hyun
학회명
2011 Materials Research Society (MRS) Fall meeting
개최국가
미국
학회 개최일
2011-11-28 ~ 2011-12-02

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