A study on the nitridation process of Cr for chmical lift-off of epi-grown GaN templates

A study on the nitridation process of Cr for chmical lift-off of epi-grown GaN templates
제목
A study on the nitridation process of Cr for chmical lift-off of epi-grown GaN templates
제목 (타언어)
A study on the nitridation process of Cr for chmical lift-off of epi-grown GaN templates
저자
BYUN, Dong Jin
발행일
2022-11-09
학회명
2022년도 한국재료학회 추계학술대회
개최국가
대한민국
학회 개최일
2022-11-09 ~ 2022-11-11