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Quantitative Profiling of Temperature and Spreading Thermal Resistance around a 70 nm Wide Nano-Heater Patterned on SOI Wafer Using NP SThM
Quantitative Profiling of Temperature and Spreading Thermal Resistance around a 70 nm Wide Nano-Heater Patterned on SOI Wafer Using NP SThM
- 제목
- Quantitative Profiling of Temperature and Spreading Thermal Resistance around a 70 nm Wide Nano-Heater Patterned on SOI Wafer Using NP SThM
- 제목 (타언어)
- Quantitative Profiling of Temperature and Spreading Thermal Resistance around a 70 nm Wide Nano-Heater Patterned on SOI Wafer Using NP SThM
- 저자
- KWON, Oh Myoung
- 발행일
- 2015-04-10
- 학회명
- 2015 MRS SPRING MEETING & EXHIBIT
- 개최국가
- 미국
- 학회 개최일
- 2015-04-06 ~ 2015-04-10