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CHARACTERISTICS OF n+-PSi-p+ HUMIDITY SENSORS USING POROUS SILICON DIAPHRAGM

  • Min Nam Ki
제목
CHARACTERISTICS OF n+-PSi-p+ HUMIDITY SENSORS USING POROUS SILICON DIAPHRAGM
저자
Min Nam Ki
학회명
The 10th Seoul International Symposium on the Physics of Semiconductors and Applications
개최지
The 10th Seoul International Symposium on the Physics of Semiconductors and Applications
학회 개최일
2000-11-01

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