A Frontside Dry-Etched Thermopile Detector with 3-5 ㎛ Infrared Absorber for NDIR CO2 Gas Sensors

  • Min Nam Ki
제목
A Frontside Dry-Etched Thermopile Detector with 3-5 ㎛ Infrared Absorber for NDIR CO2 Gas Sensors
저자
Min Nam Ki
학회명
Asia-Pacific Conference On Transducers and Micro-Nano Technology
개최국가
대만
학회 개최일
2008-05-22 ~ 2008-05-22