Effect of DC Sputtering Parameter of Molybdenum on Galvanic Reaction between Molybdenum and Copper Thin Films in Phosphoric Acid Solution

제목
Effect of DC Sputtering Parameter of Molybdenum on Galvanic Reaction between Molybdenum and Copper Thin Films in Phosphoric Acid Solution
저자
Hong MunPyo
발행일
2011-12-08
학회명
IDW'11(THE 20TH INTERNATIONAL DISPLAY WORKSHOPS)
개최국가
일본
학회 개최일
2011-12-07 ~ 2011-12-09