상세 보기
Development of a High Quality Nano-Structure Single Gas Barrier Layer by Neutral Beam Assisted Sputtering (NBAS) Process
- 제목
- Development of a High Quality Nano-Structure Single Gas Barrier Layer by Neutral Beam Assisted Sputtering (NBAS) Process
- 저자
- Hong MunPyo
- 발행일
- 2012-07-06
- 학회명
- ICMAP 2012 (The 4th International Conference on Microelectronics and Plasma Technology)
- 개최지
- Ramada Plaza Jeju Hotel, Jeju, Korea
- 개최국가
- 대한민국
- 학회 개최일
- 2012-07-04 ~ 2012-07-06