A study on the polycrystalline ITO film on PET deposited by RF and pulsed DC magnetron sputtering in vacuum roll to roll system

제목
A study on the polycrystalline ITO film on PET deposited by RF and pulsed DC magnetron sputtering in vacuum roll to roll system
저자
Ju, Byeongkwon
학회명
The 10th Asia Pacificc Conference on Plasma Science and Technology and the 23rd Symposium on Plasma Science for Materials
개최국가
대한민국
학회 개최일
2010-07-04 ~ 2010-07-08