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Six degree of freedom magnetic levitation stage using new active magnetic bearings
- 제목
- Six degree of freedom magnetic levitation stage using new active magnetic bearings
- 저자
- Jaehwa Jeong
- 학회명
- 2008 ASPE spring topical meeting
- 개최지
- Lawrence Berkeley National Laboratory
- 학회 개최일
- 2008-04-07 ~ 2008-04-08