Neutral Beam Assisted Chemical Vapor Deposition Process for Nano-Crystalline Silicon Thin Films, with applications to Flexible OLED TFT Backplane

제목
Neutral Beam Assisted Chemical Vapor Deposition Process for Nano-Crystalline Silicon Thin Films, with applications to Flexible OLED TFT Backplane
저자
Hong MunPyo
발행일
2010-07-06
학회명
10th Asia Pacific Conference on Plasma Science and Technology and the 23rd Symposium on Plasma Science for Materials
개최지
Lotte Hotel Jeju, Korea
개최국가
대한민국
학회 개최일
2010-07-04 ~ 2010-07-08