Development of a High Quality Nanolaminate Single Gas Barrier Layer by Neutral Beam Assisted Sputtering (NBAS) Process for High Efficiency Organic Microelectronic Devices

제목
Development of a High Quality Nanolaminate Single Gas Barrier Layer by Neutral Beam Assisted Sputtering (NBAS) Process for High Efficiency Organic Microelectronic Devices
저자
Hong MunPyo
학회명
The 3rd International Conference on Microelectronics and Plasma Technology
개최국가
중국
학회 개최일
2011-07-04 ~ 2011-07-07