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A low temperature hermetic package using liquid crystal polymer (LCP) materials for MEMS device
- 제목
- A low temperature hermetic package using liquid crystal polymer (LCP) materials for MEMS device
- 저자
- Ju, Byeongkwon
- 학회명
- 2007 International Conference on Nano Science and Nano Technology
- 학회 개최일
- 2007-11-08 ~ 2007-11-09