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Chemical mechanical polishing of GST film with different types of abrasives

  • Lim, Dae-Soon
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Chemical mechanical polishing of GST film with different types of abrasives
저자
Lim, Dae-Soon
발행일
2010-02-25
학회명
제17회 한국반도체 학술대회
개최국가
대한민국
학회 개최일
2010-02-24 ~ 2010-02-26

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