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Epitaxial lateral over growth of GaN on sapphire substrate using in-situ carbonized photoresist mask
Epitaxial lateral over growth of GaN on sapphire substrate using in-situ carbonized photoresist mask
- 제목
- Epitaxial lateral over growth of GaN on sapphire substrate using in-situ carbonized photoresist mask
- 제목 (타언어)
- Epitaxial lateral over growth of GaN on sapphire substrate using in-situ carbonized photoresist mask
- 저자
- BYUN, Dong Jin
- 발행일
- 2010-08-23
- 학회명
- International Conference on Electronic Materials 2010 presented by International Union of Materials Research Societies
- 개최국가
- 대한민국
- 학회 개최일
- 2010-08-22 ~ 2010-08-27