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Modeling of electrical characteristics using genetic algorithm for low temperature silicon nitride deposited by inner two parallel cylindrical coil ICPCVD
Modeling of electrical characteristics using genetic algorithm for low temperature silicon nitride deposited by inner two parallel cylindrical coil ICPCVD
- 제목
- Modeling of electrical characteristics using genetic algorithm for low temperature silicon nitride deposited by inner two parallel cylindrical coil ICPCVD
- 제목 (타언어)
- Modeling of electrical characteristics using genetic algorithm for low temperature silicon nitride deposited by inner two parallel cylindrical coil ICPCVD
- 저자
- PARK KANG-BAK
- 발행일
- 2014-07-09
- 학회명
- ICMAP 2014
- 개최국가
- 대한민국
- 학회 개최일
- 2014-07-08 ~ 2014-07-11