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Plasma Resistant Nano Y2O3 Coating on Silicon by EB-PVD

  • Lim, Dae-Soon
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Plasma Resistant Nano Y2O3 Coating on Silicon by EB-PVD
저자
Lim, Dae-Soon
발행일
2010-11-25
학회명
27th International Korea-Japan Seminar on Ceramics
개최지
인천 송도컨벤시아
개최국가
대한민국
학회 개최일
2010-11-23 ~ 2010-11-26

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