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Neutral Beam Assisted High Density Inductively Coupled Plasma Deposition Process for Controlling Crystalline Size and Passivation of Nano-Crystalline Silicon Thin Film
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- Neutral Beam Assisted High Density Inductively Coupled Plasma Deposition Process for Controlling Crystalline Size and Passivation of Nano-Crystalline Silicon Thin Film
- 저자
- Hong MunPyo
- 발행일
- 2010-08-23
- 학회명
- International Conferecne on Electronic Materials 2010
- 개최지
- Kintex, Seoul, Korea
- 개최국가
- 대한민국
- 학회 개최일
- 2010-08-22 ~ 2010-08-27