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A flexure guided stage with piezo electric transducers for laser micro/nano machining
- 제목
- A flexure guided stage with piezo electric transducers for laser micro/nano machining
- 저자
- Jaehwa Jeong
- 학회명
- euspen 10th Anniversary International Conference & 10th Annual General Meeting
- 개최국가
- 스위스
- 학회 개최일
- 2008-05-18 ~ 2008-05-22