A flexure guided stage with piezo electric transducers for laser micro/nano machining

제목
A flexure guided stage with piezo electric transducers for laser micro/nano machining
저자
Jaehwa Jeong
학회명
euspen 10th Anniversary International Conference & 10th Annual General Meeting
개최국가
스위스
학회 개최일
2008-05-18 ~ 2008-05-22