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초록
A spectroscopic ellipsometry (SE) study was performed oil BaSm2Ti4O12 (BSmT) thin films grown on TiN/SiO2/c-Si substrate grown by RF-magnetron sputtering. After deposition, the film was annealed at 400 degrees C under four different conditions of oxygen pressure. For the analysis of the measured spectra, a four-layer model containing a, BSmT film was applied, where the optical property of the BSmT layer was represented by a Tauc-Lorentz dispersion function. Our analysis clearly showed that the refractive index and the extinction coefficient of the BSmT films changed consistently with oxygen pressure during the annealing procedure.
키워드
ellipsometry; BSmT; dielectric function; magnetron sputtering; MIM CAPACITORS; DIELECTRIC-PROPERTIES
- 제목
- Optical properties of BaSm2Ti4O12 thin films studied by using spectroscopic ellipsometry
- 저자
- Yoon, J. J.; Jung, Y. W.; Hwang, S. Y.; Kim, Y. D.; Nahm, S.; Jeong, Y. H.
- 발행일
- 2008-09
- 유형
- Article; Proceedings Paper
- 권
- 53
- 호
- 3
- 페이지
- 1352 ~ 1356