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Wafer Pattern Recognition Using a 3D Image Processing Method in Semiconductor Manufacturing Process
Wafer Pattern Recognition Using a 3D Image Processing Method in Semiconductor Manufacturing Process
- 제목
- Wafer Pattern Recognition Using a 3D Image Processing Method in Semiconductor Manufacturing Process
- 제목 (타언어)
- Wafer Pattern Recognition Using a 3D Image Processing Method in Semiconductor Manufacturing Process
- 저자
- Jun-Geol Baek
- 발행일
- 2023-06-01
- 학회명
- 2023 대한산업공학회 춘계공동학술대회
- 개최지
- 제주신화월드
- 개최국가
- 대한민국
- 학회 개최일
- 2023-05-31 ~ 2023-06-03