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Pump life monitoring and failure prediction based on vibration signal analysis in semiconductor manufacturing process
Pump life monitoring and failure prediction based on vibration signal analysis in semiconductor manufacturing process
- 제목
- Pump life monitoring and failure prediction based on vibration signal analysis in semiconductor manufacturing process
- 제목 (타언어)
- Pump life monitoring and failure prediction based on vibration signal analysis in semiconductor manufacturing process
- 저자
- Jun-Geol Baek
- 발행일
- 2017-07-18
- 학회명
- 21st Conference of the International Federation of Operational Research Societies (IFORS 2017)
- 개최지
- Quebec City, Canada
- 개최국가
- 캐나다
- 학회 개최일
- 2017-07-17 ~ 2017-07-21