Fabrication and Magnetic Properties of Nonmagnetic Ion Implanted Magnetic Recording Films for Bit-Patterned Media

초록

We have investigated the magnetic M-H loop characteristics of CoCrPt-SiO(2) perpendicular recording media as influenced by nonmagnetic ion implantations. We have also developed patterned media via ion implantation using a convenient polymer nanomask approach for local control of coercivity of magnetically hard [Co/Pd](n) multilayer film with a [Co 0.3 nm\Pd 0.8 nm](8)/Pd 3 nm/Ta 3 nm layer structure. The CoCrPt-SiO2 magnetic layer having perpendicular magnetic anisotropy is sputter deposited on a flat substrate. The [Co/Pd](n) multilayer film with vertical magnetic anisotropy is deposited and the regions corresponding to the magnetic recording bit islands are coated with polymer islands using a nanoimprinting technique. Subsequent ion implantation allows patterned penetration of implanted ions into the [Co/Pd](n) multilayer film, thus creating magnetically isolated bit island geometry while maintaining the overall flat geometry of the patterned media.

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