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Effect of dc sputtering parameter of molybdenum on galvanic reaction between molybdenum and copper thin films in phosphoric acid solution
- 제목
- Effect of dc sputtering parameter of molybdenum on galvanic reaction between molybdenum and copper thin films in phosphoric acid solution
- 저자
- Hong MunPyo
- 학회명
- The 3rd International Conference on Microelectronics and Plasma Technology
- 개최국가
- 중국
- 학회 개최일
- 2011-07-04 ~ 2011-07-07