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The Electrical Properties of Al/TiN/Ti Contact according to Post Annealing Conditions

  • Sung, Man Young
제목
The Electrical Properties of Al/TiN/Ti Contact according to Post Annealing Conditions
저자
Sung, Man Young
학회명
Proceedings of KIEE
개최지
Proceedings of KIEE
학회 개최일
1995-05-27

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